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https://drivepatents.com/patents/1078731 · 6 Apr 2005
An inertial sensor is provided which includes a self-diagnosis circuit which applies an AC-bias signal voltage ahead of a synchronous demodulator, and thereby, supplies a diagnostic signal for detecting an abnormality in at least one of a detecting element...
https://drivepatents.com/patents/1079754 · 2 Mar 2005
An angular velocity sensor includes a stem and a vibrator that is supported by the stem. The vibrator is inclined to a mounting surface of the stem. The angle of inclination of the vibrator to the mounting surface is adjustable. For this reason, the angula...
https://drivepatents.com/patents/1080610 · 19 Jan 2005
The present invention provides a method of measuring a physical quantity using a vibrator. The vibrator 14 has a plurality of driving vibration arms 16A, 16B, 16C and 16D, a plurality of detection vibration arms 20, films D1, D2, D3 and D4 for adjusting a ...
https://drivepatents.com/patents/1084941 · 11 Aug 2004
The object of the present invention is to improve the sensitivity of a vibrator having at least one bending vibration arm vibrating along a specified plane in bending mode, and a base portion provided at one end of the arm. A vibrator 20A has at least one ...
https://drivepatents.com/patents/1085660 · 14 Jul 2004
The sensor has tuning fork shaped substrate (1) on which monitoring units (150) detecting vibration produced by drive units (110), and displacement detectors (120) are provided. The detectors, drive and monitoring units include lower electrode layer, piezo...
https://drivepatents.com/patents/1085664 · 14 Jul 2004
A thin film micromechanical resonator (resonator) having improved drive efficiency, a resonator gyro having improved sensitivity in detecting an angular velocity, and a navigation system and an automobile using the resonator gyro. The resonator includes a ...
https://drivepatents.com/patents/1089411 · 3 Mar 2004
An angular rate sensor for a vibration body comprising means for detecting a level of vibrations of a vibration body, detecting means for detecting a Coriolis' force produced in proportion to an angular rate, a current amplifier for amplifying an output si...
https://drivepatents.com/patents/1089746 · 11 Feb 2004
An electronic circuit is manufactured by the following method. Elements are formed on a front surface of a substrate, and then, a recess is formed around each of the element in the front surface of the substrate. Then, a portion of the substrate is removed...
https://drivepatents.com/patents/1091250 · 10 Dec 2003
There are provided a tuning fork vibrator (10) well-balanced in between legs, a vibrating gyroscope using the vibrator, an electronic apparatus using the vibrator, and a manufacturing method of the vibrator. A tuning fork vibrator (10) includes a long plat...
https://drivepatents.com/patents/1091483 · 3 Dec 2003
The present invention provides an angular velocity sensor that allows abnormality detection of the sensor from the outside and has further improved in-service reliability. The angular velocity sensor includes a pair of current amplifiers for receiving an o...