About 22 results
https://drivepatents.com/patents/984787 · 26 Jun 2013
The sensor has a coupling structure rotating about an axis (Z). The coupling structure operates a transmission of movement respectively between an accelerometer (730) by an excitation mass having a degree of freedom in translation according to an excitatio...
https://drivepatents.com/patents/984870 · 5 Jun 2013
The micro-sensor e.g. biaxial gyrometer (100), has excitation masses (131, 132) for generating vibratory movements of inertia mass i.e. primary mass (112), along two directions to generate Coriolis forces according to third direction. A detecting unit dete...
https://drivepatents.com/patents/991807 · 10 Apr 2013
A rotary disk gyroscope (20) includes a drive mass (28) and a sense mass (32). The sense mass (32) includes a cutout region (46, 48) located proximate an axis of rotation (40). Torsion springs (38), located in the cutout region (46, 48), connect the sense ...
https://drivepatents.com/patents/985309 · 27 Mar 2013
A resonator micro-electronic gyro, preferably a micro-electromechanical system (MEMS) gyro comprises a first and a second resonator mass (1, 2) suspended for rotational vibration. The two masses (1, 2) are flexibly connected by four mechanical coupling ele...
https://drivepatents.com/patents/996216 · 7 Nov 2012
The gyrometer (G1) has an inertial mass (2) suspended above a substrate. The mass is provided with an excitation part and a detection part (8). A displacing device displaces the excitation part in a direction along a plane of the mass. A capacitive detecto...
https://drivepatents.com/patents/996215 · 7 Nov 2012
The unit (2) has sensors (4a-4d), each including two inertial masses (12, 14) mechanically coupled together by an intra-sensor strong coupling structure (30). An excitation unit enables excitation of excitation parts of the masses. A detection unit detects...
https://drivepatents.com/patents/998373 · 12 Sep 2012
Disclosed herein is an inertial sensor including: a driving body displaceably supported on a flexible substrate part in a floating state; a displacement detection unit having a sensing electrode detecting displacement of the driving body; a vibrating part ...
https://drivepatents.com/patents/1006268 · 11 Jan 2012
The microsensor has a central ring (130) kinematically connected to an outer ring (110) by a linkage that transmits Coriolis force partly to the central ring without transmitting oscillating movement around an excitation axis (Z). A detector measures Corio...
https://drivepatents.com/patents/1015699 · 16 Feb 2011
A MEMS detection structure (10) comprising a substrate (2) having a top surface (2a) with at least a first fixed-electrode arrangement (5a); a sensing mass (3) extending in a plane (xy) and suspended above the substrate (2) and above the first fixed-electr...
https://drivepatents.com/patents/1066614 · 7 Jun 2006
Sensor has a movable part (100) with a drive (300,160) whereby the quantity to be measured is represented by the deflection of the movable part. The movable part gives the parasitic deflection whereby the self-test function is realized by the evaluation of...