A four-degrees-of-freedom (DOF) nonresonant micromachined gyroscope utilizes a dynamical amplification both in the 2-DOF drive-direction oscillator and the 2-DOF sense-direction oscillator, which are structurally decoupled, to achieve large oscillation amp...

An Angular-rate detecting apparatus includes four mass portions connected by at least one support beam, and the mass portions have respective individual vibration generators disposed thereon. The individual vibration generators excite the normal vibration ...

An angular velocity sensor is disclosed having a sensing element and a pair of driven mass drive elements. The driven mass drive elements have a support structure which defines at least one vibrational node. the driven mass drive element drive elements are...

An angular rotation measuring apparatus and method is described. The apparatus comprises at least one dither frame formed of an upper sensor layer, the frame having a dither axis disposed parallel to the upper sensor layer and to a parallel lower handle la...

A capacitance-type external-force detecting device includes a substrate (2), a moveable unit (7) which is supported by the substrate (2) via a supporting beam (6) and which can be displaced in the detecting direction, a comb-shaped fixed electrode (13) pro...

A vibrator (2) includes: a vibrating body (8); a driving unit (5,11) for causing the vibrating body (8) to vibrate in a predetermined vibrating direction; and a driving monitoring unit (6c,6f) for detecting vibration displacement in a driving direction of ...

A conventional angular rate sensor has a problem that the displacement amplitude of a drive gimbal frame (102) is limited due to the Pulled-in phenomenon where the drive gimbal frame is attached to drive electrodes (106), thereby decreasing its sensor sens...