About 37 results
https://drivepatents.com/patents/1092304 · 29 Oct 2003
A piezoelectric device includes a substrate, a buffer layer on the substrate, a lower electrode layer on the buffer layer, a piezoelectric layer on the lower electrode layer, and an upper electrode layer on the piezoelectric layer. The piezoelectric layer ...
https://drivepatents.com/patents/1093227 · 17 Sep 2003
An object of the present invention is to reduce the zero point temperature drift of a vibrator and the deviation or change of the drift among vibrators actually fabricated. A vibrator has a driving vibration piece 2A, a detection vibration piece and a base...
https://drivepatents.com/patents/1094081 · 13 Aug 2003
A sensing apparatus comprises a sensing unit (27,50,57) and a supporting unit (26,43,61). The sensing unit detects a direction and an amount of physical quantity applied thereto. The sensing unit has a detection reference axis (G) along which the direction...
https://drivepatents.com/patents/1094058 · 13 Aug 2003
Differential charge amplifier for processing charge signals from a rotation rate sensor, with a test signal being applied to the differential charge amplifier so that during normal operation the output of the amplifier corresponds to the test signal as wel...
https://drivepatents.com/patents/1095787 · 28 May 2003
The present invention aims to improve detection characteristics of an angular velocity sensor using a tuning fork vibrator made of a single crystalline piezoelectric material such as quartz. In order to achieve this object, the present invention directly b...
https://drivepatents.com/patents/1096761 · 16 Apr 2003
An angular velocity sensor (101) is provided that includes a frame (20), an oscillator (10) and torsion bars (30) that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed integral with each other by etching a mater...
https://drivepatents.com/patents/1097346 · 26 Mar 2003
In an angular velocity sensor including two oscillators, the oscillators are balanced in weight precisely, thus providing improved output characteristics. In the sensor, at least one of the two oscillators has a notch having a surface roughness of not high...
https://drivepatents.com/patents/1099830 · 11 Dec 2002
A balanced resonant micro electromechanical system angular rate sensor includes a feedback control loop that generates a null signal to rebalance the sense element to cancel any a Coriolis force induced displacement of the proof mass. The null signal is pr...
https://drivepatents.com/patents/1101010 · 16 Oct 2002
A tuning-fork type vibration gyro is able to suppress pyroelectric noise caused by temperature change and to obtain a sensor output having a high signal-to-noise ratio. The tuning-fork type vibration gyro includes a tuning-fork type vibration body (51) hav...
https://drivepatents.com/patents/1102828 · 31 Jul 2002
Redundant rate sensor and method in which inertial rate is monitored with a plurality of vibratory sensing elements mounted in a single enclosure, signals from the sensing elements are processed to provide an independent rate output signal for each of the ...