About 48 results
https://drivepatents.com/patents/1015516 · 23 Feb 2011
An external-force detecting apparatus (301) includes one or more drive lines (LD) connecting the corresponding drive electrodes to a driving unit (251) and one or more monitor lines LM connecting the corresponding monitor electrodes to the driving unit (25...
https://drivepatents.com/patents/1016320 · 26 Jan 2011
There are provided a tuning fork vibrator well-balanced in between legs and a vibrating gyroscope using the vibrator. The tuning fork vibrator includes a long plate-like vibration unit having one principal surface and the other principal surface, a base di...
https://drivepatents.com/patents/1067509 · 17 May 2006
A method of manufacturing an external force detection sensor in which a sensor element is formed by through-hole (20) dry etching of an element substrate (3), and an electrically conductive material is used as an etching stop layer (18) during the dry etch...
https://drivepatents.com/patents/1067669 · 10 May 2006
A method of manufacturing an external force detection sensor in which a sensor element is formed by through-hole (20) dry etching of an element substrate (3), and an electrically conductive material is used as an etching stop layer (18) during the dry etch...
https://drivepatents.com/patents/1078921 · 30 Mar 2005
An Angular-rate detecting apparatus includes four mass portions connected by at least one support beam, and the mass portions have respective individual vibration generators disposed thereon. The individual vibration generators excite the normal vibration ...
https://drivepatents.com/patents/1079446 · 9 Mar 2005
A dynamic-quantity sensor includes two piezoelectric vibrators which are arranged such that stresses generated by a dynamic quantity, such as acceleration, are applied in opposite phases to the piezoelectric vibrators. A current-voltage converting and sign...
https://drivepatents.com/patents/1083245 · 13 Oct 2004
A capacitance-sensing vibratory gyro includes a capacitance-sensing circuit that detects changes in capacitances of a sensing element. The capacitance-sensing circuit includes two operational amplifiers. The inverting input terminal of each operational amp...
https://drivepatents.com/patents/1084173 · 8 Sep 2004
A bandpass filter includes a dielectric substrate, a resonator electrode that is provided on a portion of a plane at an intermediate height in the thickness direction of the dielectric substrate so as to oppose the top face of the dielectric substrate and ...
https://drivepatents.com/patents/1087406 · 6 May 2004
A vibrator (4) has a pair of vibrating bodies (3) with both end portions fixed together by intermediate metal portions (2). Buckling vibration is applied to the vibrating bodies. Detection electrodes (9) output signals corresponding to the magnitude of the...
https://drivepatents.com/patents/1088391 · 7 Apr 2004
The gyroscope has a rectangular prism shaped vibrator (11) with two nodes (N1, N2) and support parts (12). The support parts sandwiches the nodes in a vertical direction and extends in a direction perpendicular to the vertical and longitudinal directions o...