In an example, a driver for a micro-electro-mechanical-system (MEMS) device can include a first input configured to receive a first command signal including an oscillatory command signal, a second input configured to receive a second command signal includi...

In certain examples, a quadrature cancellation apparatus can include a drive charge amplifier configured to couple to a proof mass of a MEMS device and to provide oscillation motion information, a first sense charge amplifier configured to couple to the pr...

An apparatus includes a drive signal circuit for MEMS sensor. The drive signal circuit includes an input configured to receive a voltage signal representative of charge generated by the MEMS sensor, a phase-shift circuit electrically coupled to the input a...

This document discusses, among other things, apparatus and methods for digital automatic gain control for driving a MEMS device, such as a proof mass. In an example, an apparatus can include a driver (107, 207, 307) configured to oscillate a proof mass of ...

This document discusses, among other things, apparatus and methods for quadrature cancellation of sense information from a micro-electromechanical system (MEMS) device, such as a MEMS gyroscope. In certain examples, a quadrature correction apparatus (200) ...

This document discusses, among other things, apparatus and methods for a front-end charge amplifier. In certain examples, a front-end charge amplifier for a microelectromechanical system (MEMS) device can include a charge amplifier configured to couple to ...

An apparatus includes a MEMS gyroscope sensor including a first sensing capacitor and a second sensing capacitor and an IC. The IC includes a switch circuit configured to electrically decouple the first sensing capacitor from a first input of the IC and el...