An angular velocity sensor is manufactured by simple method and has reduced size and height. It includes a base portion (1) formed by a piezoelectric single crystal and having a length in the Y-axis direction and a thickness in Z-axis direction; and four b...

An inertial sensor such as an acceleration sensor or gyro has superior impact resistance by regulating displacement of a weight portion (12) below an upper limit. The sensor includes a sensor portion that has a fixing part (14), the weight portion (12) the...

An inertial sensor comprising a sensing portion having a weight (12) hung by beams (13) extending from a frame (14), the weight being a movable portion. The beams include distortion portions partially arranged therein, and the distortion portions are arran...

An inertial sensor includes a sensing portion (10) having a weight (12) supported by beams (13), the weight (12) being a movable portion, and a weight stopper (16) that limits a movable range of the weight (12), the weight stopper (16) being arranged in a ...

An angular velocity sensor includes a stem and a vibrator that is supported by the stem. The vibrator is inclined to a mounting surface of the stem. The angle of inclination of the vibrator to the mounting surface is adjustable. For this reason, the angula...

A tuning-fork type vibration gyro is able to suppress pyroelectric noise caused by temperature change and to obtain a sensor output having a high signal-to-noise ratio. The tuning-fork type vibration gyro includes a tuning-fork type vibration body (51) hav...