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https://drivepatents.com/patents/985672 · 13 Mar 2013
The sensor (1) has cavities (5, 6) formed at a side of a diaphragm body (3) and spacers (7, 8) limited by the side of the diaphragm body. A base surface body (2) comprises apertures (9, 10) that connect the cavities with outer side of the pressure sensor, ...