A micro rate of rotation sensor for detecting a plurality of rates of rotation about orthogonal axes (x, y, z), having a substrate (20), having a plurality of masses displaceable relative to the substrate (20) and disposed in an X-Y plane parallel to the s...

A micromechanical Coriolis rate of rotation sensor for detecting a rate of rotation, comprising a substrate, a measurement axis (X-axis), a detection axis (Y-axis), and a drive axis (Z-axis), each disposed orthogonally to each other and a first and a secon...

Certain embodiments of the invention relate to gyroscope devices, and / or to methods and systems for quadrature error correction, e.g., in gyroscope devices. The gyroscope may e.g. comprise a device for quadrature error correction adapted to compensate a ...