A method of matching, in a Coriolis gyroscope, the natural frequency of a sense oscillator to the natural frequency of a drive oscillator, comprising; generating a plurality of pilot tones of different frequencies and adding each pilot tone to a feedback s...

A micro-electromechanical system (MEMS) structure for an angular rate sensor, the structure comprising: first and second silicon-insulator composite wafers formed of silicon parts electrically isolated from each other by insulator material; a planar mono-c...