Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in ...

Systems and methods for reducing relative intensity noise are provided. The system can include a photodetector configured to detect the relative intensity noise of a light source. The system can include a transimpedance amplifier configured to provide a fe...