One embodiment comprise: forming an annular recess on an upper surface of the lower wafer by etching, and a stem having a tip higher than a radially-outer-surface a generally center of the recess by etching the radially-outer-surface, which is a plane loca...

A position output device for outputting position data indicating a current position of an object, based on position data of a determined current position of the object as determined by a satellite navigation system. When a position jump has occurred in the...