A sensor for measuring physical parameters such as acceleration, rotation, magnetic field, comprises a substrate (13) defining a substrate plane and at least one sensing plate (11, 12) suspended above the substrate (13) for performing a movement having at ...

A micromechanical sensor device for measuring angular z-axis motion comprises two vibratory structures (2.1, 2.2, 7.1, 7.2) each having at least one proof mass (2.1, 2.2). A suspension structure (3.1, 4.1, 4.2, 5.1, 6.1, ..., 6.4) maintains the two vibrato...

A resonator micro-electronic gyro, preferably a micro-electromechanical system (MEMS) gyro comprises a first and a second resonator mass (1, 2) suspended for rotational vibration. The two masses (1, 2) are flexibly connected by four mechanical coupling ele...