Disclosed herein relates to an electrode sheet drying device including a guide roller having a plurality of perforated holes formed on the outer circumferential surface, and the guide roller is configured to vacuum-adsorb an electrode sheet to prevent an e...

A pressure control module includes a vacuum tank connected to a vacuum generator, the vacuum tank being configured to have a pressure therein maintained by the vacuum generator, and a control valve connected to the vacuum tank, the control valve being conf...

This workpiece conveyance device (1) comprises: a plurality of holding heads (2) having a holding section for holding a workpiece (W) and a vacuum pump (22) for generating holding force; and a conveyance track (4) for conveying the plurality of holding hea...