The present invention relates to measuring devices used in measuring angular velocity and, more specifically, to oscillating micro-mechanical sensors of angular velocity. In the sensors of angular velocity according to the present invention, at least one p...

The device has a lower substrate (100) including a lower electrode (102) and a dielectric layer (103). An intermediate substrate (200) made of single-crystal silicon and extending along a main plane is assembled outside an oscillating mass (210) by molecul...

A method of forming a MEMS device (10) includes forming a sacrificial layer (34) over a substrate (12). The method further includes forming a metal layer (42) over the sacrificial layer (34) and forming a protection layer (44) overlying the metal layer (42...

[Object] To provide an angular velocity sensor, an electronic apparatus, and a method of detecting an angular velocity, which allow high-accuracy detection of an angular velocity about an axis in a thickness direction within a plane. [0002] [Solving Means]...