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https://drivepatents.com/patents/1388616 · 25 Feb 2026
Microelectromechanical device (1) comprising a supporting body (2), containing semiconductor material and a movable mass (3), constrained to the supporting body with a relative degree of freedom with respect to at least one motion direction (D), within a r...
https://drivepatents.com/patents/1073525 · 5 Oct 2005
An inertial sensor includes a sensing portion (10) having a weight (12) supported by beams (13), the weight (12) being a movable portion, and a weight stopper (16) that limits a movable range of the weight (12), the weight stopper (16) being arranged in a ...