This document discusses, among other things, apparatus and methods for digital automatic gain control for driving a MEMS device, such as a proof mass. In an example, an apparatus can include a driver (107, 207, 307) configured to oscillate a proof mass of ...

This document discusses, among other things, apparatus and methods for quadrature cancellation of sense information from a micro-electromechanical system (MEMS) device, such as a MEMS gyroscope. In certain examples, a quadrature correction apparatus (200) ...

Provided are a gyro-sensor including a plurality of component units and a method of fabricating the gyro-sensor. The gyro-sensor includes: a substrate; a micro electro mechanical system structure including a surface including a predetermined area in which ...

A microgyroscope with two resonant plates is provided. The microgyroscope includes a substrate (1); first and second frames (11, 12) provided on the substrate to have a predetermined height, the first and second frames facing each other; a plurality of anc...

A high-vacuum packaged microgyroscope for detecting the inertial angular velocity of an object and a method for manufacturing the same. In the high-vacuum packaged microgyroscope, a substrate with an ASIC circuit for signal processing is mounted onto anoth...