A microelectromechanical device includes: a support body (8, 10-13); at least one movable mass (15) of semiconductor material, elastically constrained to the support body (8, 10-13) so as to be able to oscillate; fixed detection electrodes (22, 23) rigidly...

An electronics system comprising a board (12) that includes: a structural material (22); a thermal conduit on the structural material (22), the thermal conduit having a thermal conductivity that is higher than a thermal conductivity of the structural mater...

Methods and systems may provide for a gyratory sensing system (GSS) for extending the human machine interface (HMI) of an electronic device, particularly small form factor, wearable devices. The gyratory sensing system may include a gyratory sensor and a r...

Method for encapsulating a microelectronic device (102.1, 102.2), comprising the steps of: - producing the microelectronic device on a first substrate (104); - producing a portion (118.1, 118.2) of a first material impermeable to ambient atmosphere and per...

In an example, a driver for a micro-electro-mechanical-system (MEMS) device can include a first input configured to receive a first command signal including an oscillatory command signal, a second input configured to receive a second command signal includi...

Certain embodiments of the invention relate to gyroscope devices, and / or to methods and systems for quadrature error correction, e.g., in gyroscope devices. The gyroscope may e.g. comprise a device for quadrature error correction adapted to compensate a ...

A physical quantity sensor includes a first rocking body and a second rocking body. Each of the rocking bodies is supported on a substrate by a first supporting portion and a second supporting portion. The first rocking body is partitioned into a first reg...

An inertial sensor capable of making pressure of a space in which an inertial sensor such as an acceleration sensor is placed to be higher than that during a sealing step and improving reliability is provided. The inertial sensor can be achieved by means o...

A movable device (11) of acceleration sensors (11, 21) and a vibration device (12) of a gyroscope (12, 22) are formed on the same sensor wafer (10) spaced apart from each other by a wall (16). A cap wafer (20) having gaps (21, 22) corresponding to the mova...

Apparatus and a method for driving and detecting a motion of MEMS structure using single electrode. Apparatus includes a driving signal generation part driving MEMS structure; a motion detection part detecting motion of MEMS structure and outputting a moti...