About 2 results
https://drivepatents.com/patents/1067509 · 17 May 2006
A method of manufacturing an external force detection sensor in which a sensor element is formed by through-hole (20) dry etching of an element substrate (3), and an electrically conductive material is used as an etching stop layer (18) during the dry etch...
https://drivepatents.com/patents/1067669 · 10 May 2006
A method of manufacturing an external force detection sensor in which a sensor element is formed by through-hole (20) dry etching of an element substrate (3), and an electrically conductive material is used as an etching stop layer (18) during the dry etch...