Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode (107) out-of-plane from and proximate a first side of...

An angular velocity sensor includes a vibration, first and second sensor electrodes generating an electric charge responsive to an angular velocity applied to the vibration body, first and D/A converters each outputting at least two levels of an electric c...

An oscillator circuit includes an oscillator, a filter that filters a monitoring signal output from the oscillator and outputs the filtered signal, a driver that amplifies the filtered signal to generate a driving signal, and a controller operable to contr...

Failures can be detected with high accuracy even the ambient temperature changes or background vibration is applied. An angular velocity sensor is composed of a vibrator which is elastically and displaceably supported on a substrate; a driving means which ...

In an angular velocity sensor, there is generated a first parasitic capacitance generated between a first driving electrode and a sensing electrode, and there is generated a second parasitic capacitance generated between a second driving electrode and the ...

A device for the mechanical measure of a vibrating component contains a piezoelectric sensor made of perovskite (PZT) ceramic which is interlocked with the vibrating component and which is included in an electronic circuit for measuring the signal delivere...