Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in ...

Architectures and methods of structuring high-precision, high-stability MEMS-based angular rate sensors are provided. The structures include implements that allow the suppression of in-phase movement of the coupled masses, the mechanical enhancement of the...

A detection element has: first and second fixed parts; first and second vertical beams each connected at first and second ends to the first and second fixed parts, respectively; a horizontal beam connected at first and second ends to centers of the first a...

The present invention provides, in a physical quantity measuring system using a vibrator, a supporting structure of a vibrator for reducing the zero-point temperature drift of detection signal. It is provided a supporting member for supporting a vibrator w...

Provided is an angular velocity sensor which is thin, requires no individual adjustment and can control the generation of signals that are unnecessary to the angular velocity sensor and are generated on the sensing electrodes when the tuning fork is made t...