The platform has an external case and a suspended inertial sensor assembly (ECIS) provided with rigidly inter-linked motion sensors. An internal suspension assembly (ES1) includes a small swing comprising a set of four suspension pads (P1-P4) mounted fixed...

An angular velocity sensor, which is able to reduce the variations of driving resonance frequency of the vibrator and to improve the reliability of the sensitivity of detection signal with respect to the angular velocity applied, is provided. The angular v...

A sensor device 1 includes: a silicon substrate 10; a first electrode 11 provided at an active surface 10a side of the silicon substrate 10; an external connection terminal 12 provided at the active surface 10a side so as to be electrically connected to th...

The tuning fork is arranged on a silicon substrate such that the side surface of fork is orthogonal to the driving direction of a fork arm and faces the surface bearing of substrate. The elastic modulus of the fork varies irrespective of surface bearing of...

Vibrator (21) is received within case (30) and case (30) is contained in containing portion (43). Further, case (30) is arranged to be supported by the surrounding terminals (44 to 49) having one ends thereof embedded in containing portion (43). By virtue ...