Microelectromechanical systems (MEMS) yaw gyroscopes having out-of-plane quadrature trim electrodes are described. The gyroscope includes a proof mass configured to be driven in-plane. The proof mass includes an opening, or a plurality of openings. The out...

According to one embodiment, a sensor includes a base, a first support portion fixed to the substrate, and a first member supported by the first support portion. A gap is provided between the base and the first member. The first beam electrode and the seco...

The invention includes a sensor comprising a body (1) formed from a planar substrate. The body defines a beam (2), the opposed ends of which are adapted to be fixed in position, the beam having a preferential bending direction which makes an acute angle wi...

The present invention discloses a resonator gyroscope comprising a vibrationally isolated resonator (124) including a proof mass (102), a counterbalancing plate (104) having an extensive planar region, and one or more flexures (108) interconnecting the pro...

A rotational micro-electro-mechanical structure includes a stator (21), having a plurality of stator electrodes (33, 34), and a rotor (23), which is rotatable with respect to the stator (21) about an axis of relative rotation (A) and has a plurality of rot...

A vibrating gyroscope includes a vibrator (22) having a plurality of piezoelectric members (24, 26) stacked and polarized in directions opposing each other; at least one drive electrode (32, 34) formed on one of the mutually opposing main surfaces of the v...