About 17 results
https://drivepatents.com/patents/1398913 · 3 Jun 2026
Le procédé de calibrage d'un capteur angulaire inertiel micro-usiné (2) comprenant un support, au moins une masse vibrante mobile par rapport au support, au moins un transducteur d'excitation d'un mouvement de vibration de la masse vibrante, au moins un...
https://drivepatents.com/patents/966336 · 10 Dec 2014
An integrated MEMS inertial sensor device is described. The device includes a MEMS inertial sensor overlying a CMOS substrate. The MEMS inertial sensor includes a drive frame coupled to the surface region via at least one drive spring, a sense mass coupled...
https://drivepatents.com/patents/978790 · 5 Feb 2014
An illustrative combination acceleration and pressure sensor apparatus that is configured to include a differential resonant pressure sensor and a differential resonant acceleration sensor on a single chip. The combination sensor apparatus may include a su...
https://drivepatents.com/patents/979657 · 15 Jan 2014
An angular rate sensor (20) includes a drive mass (36) flexibly coupled to a substrate (22). A sense mass (42) is suspended above the substrate (22) is and flexibly connected to the drive mass (36) via flexible support elements (44). A quadrature compensat...
https://drivepatents.com/patents/982453 · 30 Oct 2013
In comb drive vibratory gyroscopes, drive-induced Coriolis accelerometer offset is effectively canceled by demodulating the output during equal times of in-phase (+) and anti-phase (-) drive of the shuttle with respect to the velocity signal used for angul...
https://drivepatents.com/patents/990860 · 15 May 2013
This invention is directed to provision of a high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two dead weights (2, 3); means (C1, C2, C3, C4, +vd, -...
https://drivepatents.com/patents/1012583 · 1 Jun 2011
A micromachined sensor with quadrature suppression comprising: a quadrature suppression electrode; and a resonator mass positioned adjacent to the quadrature suppression electrode, the resonator mass capable of moving substantially parallel to the quadratu...
https://drivepatents.com/patents/1012809 · 25 May 2011
Apparatus comprising a plurality of resonator structures including a pair of split masses suspended by suspension flexures, wherein each split mass includes two lobes interconnected with a flexure that allows the lobes to rotate slightly as the masses reso...
https://drivepatents.com/patents/1013282 · 4 May 2011
A technique in which a false detection and a wrong diagnosis can be suppressed in a capacitance sensor represented by an acceleration sensor is provided. A first capacitative element and a second capacitative element, which configure a capacitance detectio...
https://drivepatents.com/patents/1014146 · 6 Apr 2011
An angular-velocity detecting apparatus including a synchronous-detection unit 39 for performing the synchronous detection of a displacement signal from a vibrator 4, a unit 43 for changing a voltage value so that the output of the synchronous-detection un...