Driving circuit for a driving resonator stage (4) of a MEMS gyroscope (1) including at least a first and a second electrode (31,32) and a movable mass (20), the driving circuit (3A,3B) including: a synchronization stage (16) which receives an electrical po...

At start-up of a microelectromechanical system (MEMS) gyroscope, the drive signal is inhibited, and the phase, frequency and amplitude of any residual mechanical oscillation is sensed and processed to determine a process path for start-up. In the event tha...

The present invention provides a high-accuracy electrostatic capacitance type physical quantity sensor and angular velocity sensor configured so as to be capable of suppressing noise derived from internal noise while maintaining resistance to externally-in...

A microelectromechanical gyroscope includes a body (6) and a driving mass (7), which is movable with respect to the body (6) according to a driving axis (X) and is capacitively coupled to the body (6). The gyroscope moreover includes a driving device (3), ...

A micro-electro-mechanical sensor includes a microstructure (102), having a mass (108), which is movable with respect to a rest position (Y 0 ), according to a predetermined degree of freedom (Y); and a displacement-detecting device (104, 106) for detectin...

A resonant micro-electro-mechanical system includes: a microstructure (102) having a mass (107), which is free to oscillate in accordance with a predetermined degree of freedom (X); and a driving device (103), coupled to the mass (107) for maintaining the ...

The invention discloses a miniaturised electro-optical device comprising a first zone facing a second zone, a first condenser plate, a second condenser plate arranged in the second zone and smaller than or equal to the first condenser plate, an intermediat...