A three-axis yaw rate sensor. The sensor includes a sensor substrate, a double rotor, and a first and a second spring structure, the substrate having a main extension plane, the main extension plane being spanned by an X-axis and a Y-axis oriented perpendi...

An in-plane displacement detection structure and an accelerometer are provided. The in-plane displacement detection structure includes a substrate, a detection assembly disposed on the substrate, and electrode wires. The detection assembly includes two fir...

Dispositif (1) micro-électromécanique comprenant : un cadre ; une masse (4) d'épreuve reliée au cadre par une première liaison mécanique qui autorise un pivotement de la masse d'épreuve par rapport au cadre autour d'un premier axe (Δ) de rotation p...

A micromachined gyroscope is disclosed comprising a substrate, 3 masses m1, m2 and m3 , configured to oscillate along a first direction x or y, whereby the first mass m1 is mechanically coupled to the substrate, the second mass m2 is mechanically coupled t...