A microelectromechanical resonator where two proof masses are coupled with an antiphase coupling structure which comprises a seesaw lever and a force-displacement lever. A joint extends from the seesaw lever to the force-displacement lever and a mass conne...

The invention relates to an inertial sensor (1) comprising a substrate (2), sense frames (210, 220), drive frames (110, 120) configured to put into motion the sense frames, and a sense lever (300) pivotably mounted around a rotation axis (7). The sense fra...

An illustrative combination sensor apparatus that is configured to include a resonant differential pressure sensor and a resonant differential gyro sensor on a single chip. The combination sensor apparatus may include a substrate having a sense diaphragm, ...

A compound sensor includes a first unit including first and second oscillators symmetrically disposed to each other and being able to be displaced in a driving direction and a detecting direction; a second unit including third and fourth oscillators symmet...

A detecting element for an inertial force sensor includes a mass section, an excitation section, and a detecting section. The excitation section excites the mass section along a third direction among a first direction, a second direction, and the third dir...

The angular velocity sensor of the present invention has one end connected to holding section (9) and the other end connected to weighting section (10). According to the angular velocity sensor, driving arm (11) has a dog-leg structure of arm (11a) and arm...

The gyrometer has an excitation resonator (20) with seismic masses (12, 12`) connected to each other by connecting arms (14, 14`) and flexible units (16, 16`). Excitation combs (18, 18`) put the masses into movement in a direction (X) of a plane. A detecti...

The gyro has a fixed substrate (5) comprising engravings that partly isolates zones (8, 8`) from rest of the fixed substrate. The zone has a fixed substrate portion that has fixing legs (18, 18`). The fixed substrate is mounted on a support substrate by fi...