The semiconductor inertial sensor (30) is formed by a rotor element (38) and a stator element (39) electrostatically coupled together. The rotor element (38) is formed by a suspended mass (40) and by a plurality of mobile electrodes (41) extending from the...

A gyroscope is disclosed. In one embodiment, the gyroscope comprises a first elongated elastic member (301) and a second elongated elastic member (302) which is oriented perpendicular to the first member and connected to the center of the first member (301...

A silicon device including an insulating substrate having a recess formed on the surface thereof, and a beam-like structure made of silicon formed on the front surface of the insulating substrate to surround the recess. The beam-like structure includes at ...